METHOD FOR THE PRODUCTION OF A SYSTEM COMPRISING A SUBSTRATE AND A CAPACITIVE SENSOR WHICH IS ARRANGED ON THE SUBSTRATE

摘要

The invention refers to a method for the production of a system comprising a substrate and a capacitive sensor which is arranged on the substrate and is provided with at least one movable membrane, which comprises polymer material, and at least two mutually separate electrodes, at least one of the electrodes being connected to the at least one membrane. The method according to the invention is characterized in that it comprises the steps of (i) forming the membrane in situ on the substrate by coating the substrate with a solution of the polymer material or a precursor thereof in a suitable solvent; and (ii) forming the membrane in a suitable manner by essentially removing the solvent.