STORAGE BOX FOR AN OBJECT TO BE PROTECTED FROM PHYSICAL/CHEMICAL CONTAMINATION

摘要

A strong, lightweight, highly electrically conductive storage box having a low gas removal rate and preventing the infiltration of external atmospheric gas into said box. The box (1) has plastic walls coated on the inside and/or outside with at least one protective layer (13, 14) made of SiOxNyHt, wherein t is less than x and/or y. Said box is useful for storing silicon wafers.