| 摘要 |
PCT No. PCT/IL96/00141 Sec. 371 Date Apr. 28, 1998 Sec. 102(e) Date Apr. 28, 1998 PCT Filed Nov. 4, 1996 PCT Pub. No. WO97/17167 PCT Pub. Date May 15, 1997A process chamber for carrying out laser treatments, on the surface of an object, comprising: a base provided with object support means; a cover provided with a window substantially transmissive of laser light; gas inlet and gas outlet means; the said cover and the said base, when connected, leaving a space between the surface of the element and the inner surface of the window, in which gases flowing through the said gas inlet may flow above the surface of the object being treated and out of the process chamber through the said gas outlet. |
