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发明名称
Ladungsteilchenstrahl-Gerät, Ionenpumpe und Verfahren zum Pumpen
摘要
申请公布号
DE69219227(D1)
申请公布日期
1997.05.28
申请号
DE19926019227
申请日期
1992.07.16
申请人
HITACHI, LTD., TOKIO/TOKYO, JP
发明人
OTAKA, TADASHI, KATSUTA-SHI, JP;ICHIHASHI, MIKIO, KATSUTA-SHI, JP
分类号
G01Q60/00;H01J37/073;H01J37/18;H01J41/12;(IPC1-7):H01J37/18
主分类号
G01Q60/00
代理机构
代理人
主权项
地址
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