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发明名称
摘要
申请公布号
JP2614076(B2)
申请公布日期
1997.05.28
申请号
JP19880077936
申请日期
1988.03.29
申请人
发明人
分类号
H01L21/8222;H01L27/02;H01L27/06;H03K17/16;H03K17/64;(IPC1-7):H01L21/822
主分类号
H01L21/8222
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代理人
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地址
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