发明名称 Integrated circuit interconnect and method
摘要 <p>A method of encapsulating metal lines (130, 132, 134, 136, 138) by implantation of dopants to form surface regions (131, 133, 135, 137, 139) after the metal lines have been fabricated. The surface regions may act as passivation layers and electromigration inhibitors and so forth. <IMAGE></p>
申请公布号 EP0776040(A2) 申请公布日期 1997.05.28
申请号 EP19960115464 申请日期 1996.09.26
申请人 TEXAS INSTRUMENTS INCORPORATED 发明人 PARANJPE, AJIT
分类号 H01L21/3205;H01L21/768;H01L23/52;H01L23/532;(IPC1-7):H01L23/532 主分类号 H01L21/3205
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