FLAT MICROLENS ARRAY AND PRODUCTION METHOD THEREOF

摘要

A method of producing a microlens array by a diffusion method, which provides a microlens array having high convergence efficiency irrespective of a lens arrangement and a lens packaging ratio. A two-dimensional regular arrangement of a large number of distributed refractive index type microlenses is formed by diffusing materials which contribute to the increase of a refractive index of the substrate. The microlenses are densely arranged on the substrate surface, and diffusion fronts of individual microlenses are fused into those of the adjacent microlenses. The length of the area of fusion between two adjacent microlenses in the direction of the straight line connecting the centers of these two microlenses is not greater than 20 % of the pitch of the microlenses in said direction.