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发明名称
摘要
申请公布号
JP2615390(B2)
申请公布日期
1997.05.28
申请号
JP19850222954
申请日期
1985.10.07
申请人
发明人
分类号
H01L29/78;H01L21/04;H01L21/205;H01L21/225;H01L21/28;H01L21/336;H01L21/338;H01L21/60;H01L29/161;H01L29/24;H01L29/80;H01L29/812;(IPC1-7):H01L29/78
主分类号
H01L29/78
代理机构
代理人
主权项
地址
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