Power supply arrangement for electrodes of gas discharge chamber

摘要

Each electrode of a gas discharge chamber for plasma treatment of substrates, especially chemical gas phase deposition, in a gas discharge chamber has a voltage converter (9) mounted on it, to convert voltage from a level below ignition voltage to a level above it. The heat generating parts of the voltage converter have heat exchangers (6) which are enclosed in a mass of appropriate material to form an electrically insulating heat store (7) of adequate heat capacity, gradually heating up during the gas discharge. After the chamber has been ventilated, it gives heat out to the surroundings. The heat store contains an electronic thermostatic switch (2) to switch the voltage converter on and off. Preferably, the voltage converter is incorporated in the mounting for the electrically conductive substrate, which acts as an electrode.