发明名称 |
Coated quartz glass component |
摘要 |
Quartz glass component having a coating with a silicon carbide surface includes a gradient layer of silicon carbide and at least one additional constituent which is less hard and has a lower modulus of elasticity than silicon carbide and whose concentration decreases across the thickness of the layer from inside to outside. The coated component has good thermal-shock resistance and long-term stability in terms of its chemical resistance to hydrofluoric acid and nitric acid as well as to a mixture of these two acids. |
申请公布号 |
EP0698584(A3) |
申请公布日期 |
1997.05.28 |
申请号 |
EP19950107832 |
申请日期 |
1995.05.23 |
申请人 |
HERAEUS QUARZGLAS GMBH |
发明人 |
BREIDENBACH, POUL E.;HELLMANN, DIETMAR;LEBER, HELMUT, DR. |
分类号 |
B32B17/06;B32B18/00;C03C17/22;C03C17/34;C04B41/87;C23C16/02;C23C16/32;C23C16/44;H01L21/205;H01L21/22;H01L21/31;H01L21/673;H01L21/68;H01L21/683;(IPC1-7):C03C17/22;H01L21/00 |
主分类号 |
B32B17/06 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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