METHOD OF PRODUCING CAVITY STRUCTURES,申请号EP19950903492-传众专利搜索

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发明名称	METHOD OF PRODUCING CAVITY STRUCTURES
摘要
申请公布号	EP0775304(A1)	申请公布日期	1997.05.28
申请号	EP19950903492	申请日期	1994.12.08
申请人	PHARMACIA BIOTECH AB	发明人	ELDERSTIG, H KAN
分类号	C23F1/00;B01L3/00;B81B1/00;G01L9/00;H01L21/306;H01L29/84;H01L49/00;(IPC1-7):G01L9/00	主分类号	C23F1/00
代理机构		代理人
主权项
地址

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