Boron ion sources for ion implantation apparatus,申请号GB19960023923-传众专利搜索

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发明名称	Boron ion sources for ion implantation apparatus
摘要
申请公布号	GB2307594(A)	申请公布日期	1997.05.28
申请号	GB19960023923	申请日期	1996.11.18
申请人	* APPLIED MATERIALS INC	发明人	MAJEED * FOAD
分类号	H01J27/04;H01J37/08;(IPC1-7):H01J37/08;H01J37/317	主分类号	H01J27/04
代理机构		代理人
主权项
地址

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