申请人 |
DAINIPPON SCREEN MFG. CO., LTD., KYOTO, JP |
发明人 |
KITAKADO, RYUJI, C/O DAINIPPON SCREEN MFG.CO., LTD, HORIKAWA-DORI, KAMIKYO-KU, KYOTO, JP;YANO, HIRONOBU, C/O DAINIPPON SCREEN MFG.CO., LTD, HORIKAWA-DORI, KAMIKYO-KU, KYOTO, JP;HOKI, TETSUO, C/O DAINIPPON SCREEN MFG.CO., LTD, HORIKAWA-DORI, KAMIKYO-KU, KYOTO, JP |