PROCESS OF MANUFACTURE OF QUAZI-UNIDIMENSIONAL CONDUCTIVE FILAMENTS

摘要

FIELD: semiconductor microelectronics, design of semiconductor instruments of SHF range. SUBSTANCE: layer of another semiconductor in which chains of atoms of electrically active impurity are formed is deposited on stepped surface of semiconductor crystal. Semiconductor heterocouple is so selected that difference of outputs ensures spatial separation of channels of majority current carriers and impurity ions. EFFECT: increased mobility of majority current carriers in structure containing quasi-unidimensional conductive filaments thanks to suppression of impurity scattering.