| 发明名称 |
MANUFACTURE OF MICROCHIP FOR DETECTION OF TUNNELING CURRENT OR VERY SMALL FORCE AND FEMALE-MOLD BOARD FOR ITS MANUFACTURE AS WELL AS MICROCHIP AND PROBE WITH SAID MICROCHIP |
| 摘要 |
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| 申请公布号 |
JPH09138238(A) |
申请公布日期 |
1997.05.27 |
| 申请号 |
JP19950318564 |
申请日期 |
1995.11.13 |
| 申请人 |
CANON INC |
发明人 |
OYAMA JUNJI;SHIMADA YASUHIRO |
| 分类号 |
G01N37/00;G01Q60/16;G01Q60/38;G11B9/00;G11B9/14;(IPC1-7):G01N37/00 |
主分类号 |
G01N37/00 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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