| 摘要 |
<p>PROBLEM TO BE SOLVED: To automatically identify the size of wafer by a simple and space- saving structure by a method wherein the first detection device, with which the prescribed wafer is detected, is provided in the first region and the second detection device is provided on the outside of the first region and on the inside of the second region. SOLUTION: A wafer housing device is composed of the first cassette member which houses the prescribed wafer, the second cassette member which houses the wafer larger than the above-mentioned wafer, and a holding member which holds the above-mentioned cassette members. The first detection device 4, which detects the first cassette member, is provided on the first region AR1 where the first cassette member of the holding member 3 is mounted. Also, the second detection device 5, which detects the second cassette member, is provided outside the first region AR1 and inside the second region AR2 where the second cassette member is attached. As a result, the first cassette member and the second cassette member can be identified and the damage given by the transportation of wafer can also be prevented.</p> |
