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发明名称
MANUFACTURE OF THIN FILM TRANSISTOR
摘要
申请公布号
JPH09139508(A)
申请公布日期
1997.05.27
申请号
JP19950317489
申请日期
1995.11.10
申请人
TOYOTA MOTOR CORP
发明人
MATSUBARA KYOJI
分类号
H01L29/786;H01L21/336;(IPC1-7):H01L29/786
主分类号
H01L29/786
代理机构
代理人
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地址
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