METHOD OF SORTING SEMICONDUCTOR SUBSTRATE, HAVING EPITAXIAL GROWTH SEMICONDUCTOR LAYER AND MANUFACTURE OF SEMICONDUCTOR DEVICE,申请号JP19950298486-传众专利搜索

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发明名称	METHOD OF SORTING SEMICONDUCTOR SUBSTRATE, HAVING EPITAXIAL GROWTH SEMICONDUCTOR LAYER AND MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要
申请公布号	JPH09139408(A)	申请公布日期	1997.05.27
申请号	JP19950298486	申请日期	1995.11.16
申请人	SONY CORP	发明人	TAKIZAWA RITSUO
分类号	H01L21/66;H01L27/14;H01L27/148;(IPC1-7):H01L21/66	主分类号	H01L21/66
代理机构		代理人
主权项
地址

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