| 摘要 |
<p>PROBLEM TO BE SOLVED: To obtain a method in which a prealignment operation is executed in a state that a board to be inspected is placed on a robot arm for conveyance and in which the dislocation of a liquid-crystal board is hardly generated when the board to be inspected is moved to a measuring part from a prealignment region. SOLUTION: A liquid-crystal board 50 inside a cassette 48 is placed on a robot arm 58 so as to be transferred to a prealignment region 44. The robot arm 58 is moved to the Y-axis direction, and the angle of inclination with reference to the X-axis of of an X-side 74 of a liquid-crystal board 50 is found by using two Y-position sensors 66, 68. The liquid-crystal board 50 is shifted so as to be placed on four chuck pins 64, a rotating base 56 is turned by the angleαto the clockwise direction, the liquid-crystal board 50 is sucked again by the robot arm 58, and the rotating base 56 is returned by the angleαto the counterclockwise direction. The position in the Y-direction of the liquid- crystal board 50 is decided, a robot body 54 is moved to the X-axis direction along a rail 60, and a Y-side 76 of the liquid-crystal board 50 is detected by an X-position sensor 70. Thereby, a prelaignment operation is completed.</p> |
