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发明名称
METHOD AND APPARATUS FOR DETECTING PATTERN
摘要
申请公布号
JPH09138107(A)
申请公布日期
1997.05.27
申请号
JP19950321096
申请日期
1995.11.15
申请人
NIKON CORP
发明人
ISHII YUUKI
分类号
G01B11/00;G01B11/02;H01L21/66;(IPC1-7):G01B11/00
主分类号
G01B11/00
代理机构
代理人
主权项
地址
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