Hydrogen peroxide removal equipment capable of treating both waste water and waste gas

摘要

There is provided a hydrogen peroxide removal equipment which has a high capability for removing hydrogen peroxide and is able to cope with variation in amount of a hydrogen peroxide containing waste water and variation of a hydrogen peroxide concentration occurring in a semiconductor plant. A tank 51 is internally provided with a first decomposition section 16, a second decomposition section 17 and a third decomposition section 8 which are constituted by combining a charcoal 9 and a plastic material 10 having a void capable of allowing water and gas to pass therethrough. The first and second decomposition sections 16 and 17 are provided below the level of an outlet port 42 and arranged on both sides of a vertical partition plate 13 located apart from a bottom plate 51E. The third decomposition section 8 is provided above the level of the outlet port 42 and arranged above the first and second decomposition sections 16 and 17. A gas discharging section 12 which discharges a gas upwardly from below the first decomposition section 16 and a water sprinkling device 18 which pumps up a waste water in the tank 51 and sprinkles the same on the third decomposition section 8 are provided.