| 摘要 |
PROBLEM TO BE SOLVED: To obtain an inspection apparatus by which even a sheet of low-sensitivity fluorescent paper can be used in an industrial field by a method wherein X-rays are transmitted through an object to be inspected, they are then transmitted through a sheet of fluorescent sensitized paper, an optical image emitted by the sheet of sensitized paper is imaged by a solid-state imaging element camera and an image signal is displayed on a monitor TV by an image processing part. SOLUTION: A sheet of fluorescent sensitized paper 4 is arranged, via an object 3 to be inspected, in a position which is irradiated with radiant light of X-rays 2. When the X-rays 2 irradiate the part of the sheet of fluorescent sensitized paper 4 in a part excluding a part shielded by the object 3 to be inspected emits light, an optical image becomes visible light 23, and the light is transmitted through a lead glass 5 do as to be image-formed on a solid- state imaging element 42 by an optical part 6 at a solid-state imaging element camera 7. The camera 7 is required to be surrounded in such a way that a face on which the X-rays 2 are incident is cut off completely by a lead box 55 and and that light does not enter the camera 7 from parts other than a prescribed optical path. Thereby, a direct imaging-type X-ray fluorescent image inspection apparatus whose resolution is high and which is excellent in the point of a field of view is obtained by using the sheet of fluorescent sensitized paper which is inferior in the point of sensitivity, which is excellent in sharpness and which is low-cost. |
