发明名称 MANUFACTURE OF ELECTROSTATIC DEFLECTION UNIT
摘要 PROBLEM TO BE SOLVED: To form plural electrodes in which a large eddy current is hardly generated and arranged these plural electrodes with high precision in a specified angle relationship. SOLUTION: Electrodes 2A to 2H are formed by attaching a conductive film to part of an insulation material excluding its outer circumference, and the conductive film is attached to at least part of the inner face of an insulation external cylinder 4. After the protrusion parts of electrodes 2A to 2H are inserted into grooves 1a to 1h, respectively, of a cylindrically shaped holding jig 1 made of aluminum, the outer circumference of the electrodes 2A to 2H is fixed to the inner face of the external cylinder 4 via a set screw 2A and the like. After a lead wire is mounted on the side face of the electrodes 2A to 2H, the holding jig 1 is dissolved and removed with phosphate by soaking the jig in phosphate.
申请公布号 JPH09139184(A) 申请公布日期 1997.05.27
申请号 JP19950296672 申请日期 1995.11.15
申请人 NIKON CORP 发明人 NAKASUJI MAMORU
分类号 H01J9/236;H01J37/147;H01L21/027;(IPC1-7):H01J37/147 主分类号 H01J9/236
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