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发明名称
SPUTTERING APPARATUS
摘要
申请公布号
JPH09137272(A)
申请公布日期
1997.05.27
申请号
JP19960130997
申请日期
1996.04.26
申请人
DAIU DENSHI KK
发明人
KIN HANCHIN
分类号
C23C14/35;G11B5/127;(IPC1-7):C23C14/35
主分类号
C23C14/35
代理机构
代理人
主权项
地址
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