| 摘要 |
PROBLEM TO BE SOLVED: To obtain an array probe in which beam patterns are made uniform and by which the reproducibility and the reliability of a flaw detection capability are enhanced by a method wherein electrodes which are arranged at outermost ends of split electrodes are arranged in such a way that their width size is made larger than every width size of electrodes which are arranged at the inside. SOLUTION: In an array probe, respective split electrodes 11a, 11b are shaped to be parallelograms. As a result, beam patterns 12a, 12b formed at a time when a voltage is applied across the split electrodes and a whole-face electrode 2 supplement intermediate parts between the mutually adjacent electrodes 11a, 11b, and an echo- height drop amount y3 which is generated in the intermediate parts can be reduced. In addition, since every width size w2 of the split electrodes 11a at both ends is larger than every width size w1 of the split electrodes 11b at the inside, the beam patterns 12a which are generated at ends can be made nearly equal to the beam patterns 12b which are generated at the inside. In addition, when an angle at every acute angle of the parallelogram split electrodes 11a, 11b is set in a range of 45 deg. to 85 deg., even a flaw in a small width of about 1mm can be detected surely by any of the electrodes 11a, 11b. |
