WAFER CONTAINER WITH INNER-PRESSURE ADJUSTING MECHANISM

摘要

PROBLEM TO BE SOLVED: To provide a wafer container having a inner-pressure adjusting mechanism, which facilitates reuse and recycling. SOLUTION: A wafer container comprises a body 13 for containing a number of wafers 12, and a lid 14 that covers the body 13 to keep the wafers inside clean. A removable filter 27 is attached to an opening 26, which is opened in the body 13 or the lid 14 or between the body and lid. The filter 27 serves to adjust the pressure in a carrier box 11, while passing air for filtering. The opening 26 and the filter 27 form a device 25 for internal pressure adjustment.