| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a uniform electron emission characteristic by minimizing the dispersion in electric characteristic even if the distance between an emitter electrode and a gate electrode is not constant. SOLUTION: This element is provided with a glass substitute 1, an emitter wiring layer 2 formed on a glass substrate 1, an insulation layer 7 formed on the emitter wiring layer 2, a gate electrode 8 formed on the insulation layer 7, a small hole of its specified size formed on the insulation layer 7 and the gate electrode 8, and an edge-type emitter electrode formed in the small hole and electrically connected to the emitter wiring layer 2. In this case, the emitter electrode is a two-stage constitution of an emitter top electrode 4 and an emitter bottom electrode 3 successively connected to the emitter top electrode 4, and the emitter top electrode 4 is so structured that the section thereof is shaped to have been sandwiched in a recess shape and the top tip end part of the recess shape is sharpened 4a.</p> |
