发明名称 FORMATION OF LAYER HAVING PRESCRIBED PLANE PATTERN
摘要 <p>PROBLEM TO BE SOLVED: To form a layer having prescribed plane patterns without wasting materials as far as possible. SOLUTION: A paste layer 45 having the pattern P2 larger by one size than the prescribed plane pattern P1 is formed by printing in the case where the metallic layer having the plane pattern P1 is formed. This paste layer 45 is composed of a resist material prepd. by dispersing metallic particles into a photosensitive resin. In succession, the paste layer 45 is exposed by using a photomask having the plane pattern P1 and the paste layer 45 after the exposure is developed, by which the parts exclusive of the contour lines of the closed region constituting the plane pattern P1 are removed. The metallic layer having the plane pattern P1 is formed if the resin component is removed by baking the remaining parts of the paste layer 45.</p>
申请公布号 JPH09138509(A) 申请公布日期 1997.05.27
申请号 JP19950317174 申请日期 1995.11.10
申请人 DAINIPPON PRINTING CO LTD 发明人 HOSOYA MORIO
分类号 G03F7/40;H01J9/02;H01L21/027;H01L21/28;(IPC1-7):G03F7/40 主分类号 G03F7/40
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