发明名称 Pirani pressure sensor
摘要 The invention is a method and apparatus for a pirani pressure sensor. The apparatus consists of a current supply and current receiving means affixed to a substrate. Bridging the current supply means and current receiving means is an electrically conductive polymer. The pirani pressure sensor may be made using conventional photolithographic techniques.
申请公布号 US5633465(A) 申请公布日期 1997.05.27
申请号 US19950384826 申请日期 1995.02.07
申请人 KAUFMANN, JAMES;MOSS, MARY G.;BREWER, TERRY L. 发明人 KAUFMANN, JAMES;MOSS, MARY G.;BREWER, TERRY L.
分类号 G01L21/12;(IPC1-7):G01L21/12 主分类号 G01L21/12
代理机构 代理人
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