| 摘要 |
PROBLEM TO BE SOLVED: To improve the inspection reliability and shorten the alignment time by emitting a light to a probe pin, sensing its tip end by a CCD camera, and leading the probe pin accurately to a terminal part of a panel. SOLUTION: A liquid crystal indication panel 20 is placed on a lifter 1. The sliding part of a suction table 2 is pulled out, and while the panel 20 is sucked and held thereby, the sliding part is pushed to the original position. The panel 20 is positioned in a manner that its terminal part is brought into contact with a test head 7, and the terminal part of the panel 20 is indicated on a monitor. The table 2 is lowered and a probe pin 5 is temporarily brought into contact with the terminal part of the panel 20. The terminal part and pin 5 are illuminated by a light 6 for probe and a light 11 for vertical illumination, so that they are picked up by a CCD camera 9. According to the image of tip end of the pin 5 that is displayed by a monitor, a displacement qauntity between the terminal part and pin 5 is recognized, and an XYθtable 3 is moved for alignment according to the obtained displacement quantity. Then the pin 5 is brought into contact with the terminal part of the panel 20 again. As a result, an inspection can be performed in a high reliability and for a short time.
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