| 摘要 |
a driving substrate(130) where transistors are built in and which has contact terminals connected with the transistors electrically on its surface; an actuator supporting part(120) formed on the driving substrate(130) having contact terminals connected electrically; an actuator(400) comprising an elastic part(180) formed with a nitride or an oxide, a signal electrode(160) connected with a conduction terminal connected electrically on the driving substrate(130), a transformation part(170) made of a thin ceramic film, a plug(115) connecting the transformation part(170) with the contact terminal electrically and a bias electrode(190) connected with a conduction terminal connected electrically on the driving substrate(130); a mirror(110) formed on the surface of the actuator(400); and a bending-preventing supporting part(140) located on the top surface of the other axis of the driving substrate(130).
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