摘要 |
a substrate which has transistors and a first and a second conducting wire pattern, which are connected to external terminals, formed on its surface; an actuator which has a hexahedral transformation part polarized along the y axis, and a first and a second electrode which generate an electric field on the x axis by being connected with the first and the second conducting wire pattern electrically; and a mirror attached on the surface of the first and the second electrode.
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