| 摘要 |
a first supporter(11) formed on both sides; a second supporter(12) formed to face with the first supporter(11); a membrane(13), a signal electrode(14), a transformation part(15) and a bias electrode(16) formed over the surface of the first and the second supporter(11,12) in sequence; and a mirror formed on the pixel region on the bias electrode(16) with both sides torn at right angles.
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