MANUFACTURING METHOD OF OPTICAL PATH REGULATING APPARATUS

摘要

forming first grooves vertically on the surface of one side of a ceramic wafer; forming M x N signal electrodes on both sides of the first groove of the ceramic wafer; building the ceramic wafer in a driving substrate, where transistors are built in and which has contact terminals on its surface, in order that signal electrodes may be connected with contact terminals; defining transformation parts by forming a bias electrode on the surface of the other side of the ceramic wafer and by forming second grooves between first grooves; forming third grooves by removing the bias electrode corresponding to first grooves and some part of the ceramic wafer; and forming a mirror body whose bottom is attached to third grooves, and forming a mirror surface on the surface of the mirror body.