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经营范围
发明名称
Plasma-Behandlungsgerät
摘要
申请公布号
DE69401549(T2)
申请公布日期
1997.05.22
申请号
DE19946001549T
申请日期
1994.07.28
申请人
APPLIED MATERIALS, INC., SANTA CLARA, CALIF., US
发明人
CHANG, MEI, CUPERTINO, CA 95014, US;CISSY, LEUNG, FREMONT, CA 94359, US
分类号
H05H1/46;C23C16/02;C23C16/50;H01J37/32;H01L21/205;H01L21/302;H01L21/3065;H01L21/31;(IPC1-7):H01J37/32
主分类号
H05H1/46
代理机构
代理人
主权项
地址
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