REFLECTION-FREE ELLIPSOMETRY MEASUREMENT APPARATUS AND METHOD FOR SMALL SAMPLE CELLS,申请号EP19940900582-传众专利搜索

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发明名称	REFLECTION-FREE ELLIPSOMETRY MEASUREMENT APPARATUS AND METHOD FOR SMALL SAMPLE CELLS
摘要
申请公布号	EP0620914(B1)	申请公布日期	1997.05.21
申请号	EP19940900582	申请日期	1993.11.09
申请人	SANTA BARBARA RESEARCH CENTER	发明人	RHIGER, DAVID, R.;GARWOOD, GERALD, A., JR.
分类号	G01N21/03;G01N21/21;G02B27/00;(IPC1-7):G01N21/21	主分类号	G01N21/03
代理机构		代理人
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