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摘要
申请公布号
JP2611732(B2)
申请公布日期
1997.05.21
申请号
JP19930311408
申请日期
1993.12.13
申请人
发明人
分类号
H05H1/46;C23F4/00;H01J37/32;H01L21/302;H01L21/3065;H01L21/31;H05H3/00;H05H3/02;(IPC1-7):H05H1/46;H01L21/306
主分类号
H05H1/46
代理机构
代理人
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地址
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