发明名称 METHOD AND DEVICE FOR PURIFYING TIGHTLY CLOSED SPACE
摘要 <p>PROBLEM TO BE SOLVED: To provide a safe and practically efficient purifying method for a tightly closed space low in operation cost and to provide the device therefor. SOLUTION: By this purifying method, fine particles contained in the tightly closed space 10 are collected by irradiating a photoelectron emitting material 4 with ultraviolet ray 3 and/or radial ray under an electric field 5 to emit photoelectrons into the tightly closed space 10 and charging the fine particles by the photoelectrons. In such a case, an inert gas 20 is intermittently introduced into the tightly closed space 10 and the inert gas is preferably gaseous nitrogen.</p>
申请公布号 JPH09131547(A) 申请公布日期 1997.05.20
申请号 JP19950314866 申请日期 1995.11.09
申请人 EBARA CORP 发明人 FUJII TOSHIAKI
分类号 B03C3/38;H01L21/673;H01L21/68;(IPC1-7):B03C3/38 主分类号 B03C3/38
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