发明名称 Automatic matching and tuning network
摘要 The present invention relates to a matching and tuning network for connecting a source of RF power to a complex load. The network is comprised of a primary circuit and a secondary circuit. The primary circuit is comprised of a fixed capacitor connected in series with a primary winding of a coupling transformer connected to said source of RF power. The secondary circuit is comprised of a series connection of a secondary winding of said coupling transformer and a variable capacitor connected to said load. The network is further comprised of an input voltage sensor; and an input current sensor both connect to an impedance detector and a phase detector. The impedance detector controls an encoder for varying the coupling between the primary winding and the secondary winding of the coupling transformer to maintain a constant input impedance. The phase detector controls the same encoder for varying the capacity of the variable capacitor so as to maintain a zero phase shift at the input to the network.
申请公布号 US5631611(A) 申请公布日期 1997.05.20
申请号 US19960666623 申请日期 1996.06.18
申请人 NAUTEL LIMITED 发明人 LUU, KY T.
分类号 H03H7/40;(IPC1-7):H03H7/40 主分类号 H03H7/40
代理机构 代理人
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