| 摘要 |
PROBLEM TO BE SOLVED: To provide an acceleration detection element capable of detecting the acceleration in two or more directions. SOLUTION: A base end side of a beam 4 is fixed to a supporting part 6 on a base plate 3. A weight 5 is provided on a surface of the base plate 3 on the tip side of the beam 4 which is expanded in the horizontal direction along a base plate surface through a clearance. The position of the center G of gravity of the weight 5 is away from the center axis of the beam 4 in the perpendicular direction so that the inertial moment is applied when the acceleration in the longitudinal direction (X-direction) is exerted. The tip surface of the weight 5 is the surface of a movable electrode 7, and a fixed electrode 8 is formed at the position opposite to the movable electrode 7 through the clearance. When the acceleration in the X-direction or the Y-direction is exerted, the beam 4 is deflected vertically according to the quantity of the acceleration, and the weight 5 is tilted while it is displaced in the vertical direction, and the electrostatic capacity between the movable electrode 7 and the fixed electrode 8 is increased/decreased. The quantity of the acceleration is detected based on the change. |
