发明名称 SUBSTRATE CONVEYING DEVICE
摘要 PROBLEM TO BE SOLVED: To achieve a pertinent conveyance of substrates and the improvement of productive efficiency by conveying small rectangular substrates for use in thermal heads, etc., by means of conveying rollers. SOLUTION: With the substrate conveying device 38, plural conveying rollers 40 which extend across the width, and which are installed in parallel in the conveying direction to be rotationally driven, are arranged from a carrying-in part 12 to a carrying-out part 26 to convey substrates B. Besides, three thin-shaft parts which correspond to the size of the width of the substrate B, are formed in the axial direction of each conveying roller 40 at specified intervals, and the substrates B are received by the three thin-shaft parts so that the three substrates B can be conveyed in parallel.
申请公布号 JPH09132309(A) 申请公布日期 1997.05.20
申请号 JP19950291192 申请日期 1995.11.09
申请人 DAINIPPON SCREEN MFG CO LTD 发明人 YOSHIDA KOZO;INOKUCHI DENICHI;SHIMAJI KATSUMI
分类号 G02F1/13;B65G13/00;B65G39/02;H01L21/677;H01L21/68;(IPC1-7):B65G13/00 主分类号 G02F1/13
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