| 摘要 |
PROBLEM TO BE SOLVED: To efficiently and effectively perform a sterilization process using hydrogen peroxide gas. SOLUTION: Subject matter in a container 1 is sterilized by contact with hydrogen peroxide gas. In the container 1, excessive gas is discharged from a gas discharge passage 31, while hydrogen peroxide gas is continuously supplied from a gas supply port 11. Concentration of hydrogen peroxide gas in the container 1 is kept within a specified range which is preliminarily set by controlling supply quantity of hydrogen peroxide gas based on an output of a semiconductor gas sensor 4. Before supply of hydrogen peroxide gas, only drying air as carrier gas is supplied to the container 1, so a relative humidity in the container 1 is reduced. Discharged gas is discharged to open air after reducing the concentration of hydrogen peroxide gas by contact with activated carbon filled in a harm eliminator 32. |
