Displacement element, probe employing the element, and apparatus employing the probe

摘要

A cantilever type displacement element includes a piezoelectric film and an electrode provided on each face of the film to displace the film by convence piezoelectric effect. The electrodes are formed from platinum or palladium. The displacement element constitutes a cantilver type probe having a tip on the free end of the element. The probe is used in a scanning tunneling microscope or an information processing apparatus.