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发明名称
BONDING TOOL EXCELLENT IN OXIDATION RESISTANCE
摘要
申请公布号
JPH09134938(A)
申请公布日期
1997.05.20
申请号
JP19960015801
申请日期
1996.01.31
申请人
KOBE STEEL LTD;SHINKO KOBELCO TOOL KK
发明人
NISHIKAWA MASATOSHI;SUGIZAKI YASUAKI;SATO TOSHIKI;SAI MASANORI;NISHIMURA KOZO;INOUE TAKAO;MIYATA KOICHI
分类号
H01L21/60;(IPC1-7):H01L21/60
主分类号
H01L21/60
代理机构
代理人
主权项
地址
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