| 摘要 |
PROBLEM TO BE SOLVED: To prevent particles and organic gas produced in a bearing section and a belt inside a conveying device which is used in a vacuum chamber from flowing out into the vacuum chamber so as to prevent the pollution of a semiconductor wafer which is an object to be conveyed. SOLUTION: A first arm 1 and a second arm 2 are covered with cover bodies 41, 46 the inside of which is air-tight. Magnetic seal sections 43, 46, 47 are provided between the cover body 41 (46) and a rotary shaft in a joint section to separate the atmosphere inside the cover body 41 (46) from the atmosphere inside a vacuum chamber in spite of the rotation of the rotary shaft. The inside of the cover body is communicated with the vicinity of an exhaust pipe 81 and an air supply pipe 83 through the inside of the rotary shaft in a basic end section of the first arm 1 and check valves 71, 72, and it is possible to prevent the breakage of the magnetic seal sections by making operating pressure of the check valves 71, 72 lower than allowance pressure of the magnetic seal sections. |
