| 摘要 |
PROBLEM TO BE SOLVED: To prevent the photoelectric conversion characteristics of a photovoltaic device from being reduced by a method wherein with first electrodes heated by irradiation with a laser beam, a photoelectric conversion layer coating the first electrodes by heat conduction is heated and is divided. SOLUTION: When prescribed parts of an amorphous semiconductor film 3 are removed, the prescribed parts are irradiated with a laser beam 6. The absorption factor of the film 3 to the beam 6 is smaller that of first electrodes 2... to the beam 6. Accordingly, most of the irradiating laser beam 6 penetrate the film 3, is absorbed in the electrodes 2..., which are a base, and the electrodes, 2... are heated. With this heating, the prescribed parts of the film 3 formed by coating the electrodes 2 are also heated by heat conduction and hydrogen existing in the amorphous semiconductor film is explosively exhausted. With this exhaust of the hydrogen, a strain is generated in the film 3, the adhesion of the film 3 to the electrodes 2, which are the base, is reduced, the film 3 is peeled from the electrodes 2 and is removed. As a result, the prescribed parts can be formed into a plurality of photoelectric conversion layers 3.... |
