FIELD EMISSION TYPE ELECTRON SOURCE AND ITS MANUFACTURE

摘要

PROBLEM TO BE SOLVED: To provide a manufacturing method of an electron source having a negative electrode which can radiate a large electric current. SOLUTION: After an insulating film 11 and a first metallic film are accumulated in order on a substrate 10, an opening part is formed in the insulating film 11 and the first metallic film, and a pullout electrode 12B composed of the first metallic film is formed. Next, after a silicon oxide film having a recessed part having a microscopic diameter is accumulated on the substrate 10, directional dry etching is performed on this silicon oxide film, and a ring- shaped silicon oxide film 14B having an opening part having a microscopic diameter is formed inside the opening part. Next, after a second metallic film 15A is accumulated on the whole surface of the base board 10 containing the inside of the opening part of the ring-shaped silcon oxide film 14B, etching is performed on the second metallic film 15A until the pullout electrode 12B and the ring-shaped silicon oxide film 14B are exposed, and a needle-like negative electrode 15B is formed, and afterwards, the silicon oxide film 14B is removed.