| 摘要 |
PROBLEM TO BE SOLVED: To obtain an animation in a real time by a method wherein a group of a metal layer and an insulating layer is arranged in the direction of incidence of such electromagnetic waves as X-rays and a detecting part, which has a semiconductor layer, for such the electromagnetic as the X-rays is provided on the side of the insulating layer. SOLUTION: A tungsten layer is formed on a glass substrate 101 as a metal layer 102. As the layer 102 is used as an X-ray absorption layer, a metal having a large X-ray absorption coefficient, such as tungsten (W), gold (Au), tantalum (Ta) or lead (Pb), is chosen as the material for the layer 102. Then, as an insulating layer 103, an amorphous silicon nitride hydride film is deposited. Then, as a semiconductor layer 104, a non-single crystal semiconductor layer, such as an i-type or substantial i-type amorphous silicon hydride layer, is deposited and moreover, an n<+> amorphous silicon hydride layer 105, which ohmic-connects the layer 104 with an electrode, is deposited. Lastly, the aluminium electrode 106 is deposited. Thereby, a tunnel leakage current can be low suppressed and X-rays can be detected directly and with good sensitivity.
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