发明名称 Method of fabricating quantum bridges by selective etching of superlattice structures
摘要 A quantum bridge structure including wires of a semiconductor material such as silicon which are formed by selectively etching a superlattice of alternating layers of at least two semiconductor materials. The quantum bridge is useful as a photo emission device, a photo detector device, and a chemical sensor. The wires exhibit improved electrical conduction properties due to decreased Coulomb scattering.
申请公布号 US5630905(A) 申请公布日期 1997.05.20
申请号 US19950465493 申请日期 1995.06.05
申请人 THE REGENTS OF THE UNIVERSITY OF CALIFORNIA 发明人 LYNCH, WILLIAM T.;WANG, KANG L.;TANNER, MARTIN O.
分类号 H01L29/12;H01L31/0352;H01L33/04;H01L33/06;(IPC1-7):H01L21/20 主分类号 H01L29/12
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