| 摘要 |
PROBLEM TO BE SOLVED: To achieve simplification and space saving of a manufacturing apparatus by securing the adequate retrieval of a substrate to be processed, and omitting a positioning device. SOLUTION: A conveying unit 18 is constituted so that a contained substrate B is taken out by advancing and reversing a hand member 34 along the inside and outside of a cassette 14a. At this time, the substrate B can be taken out under the non-contact state with an inner wall 39a by advancing and reversing a hand member 38 on the horizontal plane with respect to a cassette inner wall 39a. Furthermore, sensors 36a and 36b are provided at the hand member 34, and the distance between the hand member 34 and the cassette inner wall 39a is detected. Based on the result, the relative inclination of the hand member 34 and the inner wall 39a of the cassette 14a is obtained in an operating means 56. Furthermore, the correcting amount for conveying-unit driving is obtained so that the hand member 34 is advanced and retarded in parallel with the inner wall 39a. The conveying unit 18 is operated by a main control mean in consideration of the correcting amount. |
